Growth instabilities of vapor deposited films: atomic size versus deflection effect
نویسندگان
چکیده
Two previously suggested, physically distinct mechanisms for a growth instability of vapor deposited films, the finite atomic size effect and the particle deflection effect due to interatomic attraction, are reconsidered, further analyzed, and compared. We substantiate why the instability caused by interatomic attraction must be considered as the truly underlying instability mechanism. We demonstrate that aspects of the structure zone model of Movchan and Demchishin can also be consistently explained using the growth instability induced by particle deflection instead of the instability arising from the atomic size effect. Most significantly we show that, for vapor deposited amorphous Zr65Al7.5Cu27.5-films, the growth instability due to the atomic size effect cannot be present. PACS. 68.55.-a Thin film structure and morphology – 81.15.Aa Theory and models of film growth
منابع مشابه
Thickness Dependence of Sensitivity in Thin Film Tin Oxide Gas Sensors Deposited by Vapor Pyrolysis
Transparent SnO2 thin films were deposited on porcelain substrates using a chemical vapor deposition technique based on the hydrolysis of SnCl4 at elevated temperatures. A reduced pressure self-contained evaporation chamber was designed for the process where the pyrolysis of SnCl4 at the presence of water vapor was carried out. Resistive gas sensors were fabricated by providing ohmic contacts o...
متن کاملEvaluation of the Effect of Ni-Co NPs for the Effective Growth of Carbon Nanotubes by TCVD System
A systematic study was conducted to understand the influences of catalyst combination as Ni-Co NPs on carbon nanotubes (CNTs) grown by Chemical Vapor Deposition (TCVD). The DC-sputtering system was used to prepare Co and Ni-Co thin films on silicon substrate. Ni- Co nanoparticles were used as metal catalyst for growing carbon nanotubes from acetylene (C2H2) gas in 850 ̊ C during 15 min. Carb...
متن کاملPhysical self-assembly and the nucleation of three-dimensional nanostructures by oblique angle deposition
Growth front morphology of a thin film formed by physical vapor deposition is controlled by many factors including surface diffusion and shadowing effects. Instabilities can occur if shadowing is more dominant compared to other surface effects and can lead to many diverse physically self-assembled three-dimensional nano-size structures. In this article, we explore the fundamental nucleation and...
متن کاملMechanical Properties and Microstructural Evolution of Ta/TaNx Double Layer Thin Films Deposited by Magnetron Sputtering
Crystalline tantalum thin films of about 500nm thickness were deposited on AISI 316L stainless steel substrate using magnetron sputtering. To investigate the nano-mechanical properties of tantalum films, deposition was performed at two temperatures (25°C and 200°C) on TaNx intermediate layer with different N2/Ar flow rate ratio from 0 to 30%. Nano-indentation was performed to obtain the mechani...
متن کاملBand-Gap Tuning Of Electron Beam Evaporated Cds Thin Films
The effect of evaporation rate on structural, morphological and optical properties of electron beam evaporated CdS thin films have been investigated. CdS thin film deposited by electron beam evaporation method in 12nm/min and 60nm/min evaporation rates on glass substrates. X-ray diffraction, scanning electron microscopy, UV-Vis-NIR spectroscopy and Atomic Force Microscopy were used to character...
متن کاملذخیره در منابع من
با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید
عنوان ژورنال:
دوره شماره
صفحات -
تاریخ انتشار 2002